EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

     We hereby consent to the incorporation by reference in the Registration
Statements on Forms S-8 (Nos. 333-66781, 333-12473 and 333-462) of our report
dated April 28, 2000 appearing in Tegal Corporation's Annual Report on Form
10-K/A for the year ended March 31, 2000.

/s/  PricewaterhouseCoopers LLP

San Jose, California
August 17, 2000