Exhibit 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in this Registration Statement on Form S-3 (No. 333-38086) of our report dated April 28, 2000, relating to the financial statements and the financial statement schedule, which appears in Tegal Corporation's Annual Report on Form 10-K/A for the year ended March 31, 2000. We also consent to the reference to us under the heading "Experts" in such Registration Statement. /s/ PRICEWATERHOUSECOOPERS LLP - ------------------------------ San Jose, California August 17, 2000