EXHIBIT 23.1
 
                       CONSENT OF INDEPENDENT ACCOUNTANTS
 
We hereby consent to the incorporation by reference in the Registration
Statements on Form S-8 (No. 333-462 and 333-12473) of Tegal Corporation of our
report dated April 23, 1997 appearing on page 44 of Tegal Corporation's Annual
Report on Form 10-K. We also consent to the incorporation by reference of our
report on the Financial Statement Schedule, which appears on page S-2 of this
annual report on Form 10-K.
 
                                          /s/ Price Waterhouse LLP
                                          PRICE WATERHOUSE LLP
 
San Jose, California
June 24, 1997