Exhibit 23.3



The Board of Directors
Tegal Corporation:


We consent to incorporation herein by reference of our reports dated April 23,
1996, relating to the consolidated balance sheets of Tegal Corporation and
subsidiaries as of March 31, 1996, and 1995, and the related consolidated
statements of earnings, retained earnings, and cash flows for each of the years
in the two-year period ended March 31, 1996, and the related consolidated
financial statement schedule, which reports appear in the March 31, 1997, annual
report on Form 10-K of Tegal Corporation and to the reference to our firm under
the heading "Experts" in the prospectus.



/s/ KPMG Peat Marwick LLP
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KPMG Peat Marwick LLP
Mountain View, California

May 4, 1998