EXHIBIT 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in the Registration Statements on Forms S-8 (Nos. 333-66781, 333-12473 and 333-462) of our report dated April 28, 1999 appearing on page 38 of Tegal Corporation's Annual Report on Form 10-K for the year ended March 31, 1999. PricewaterhouseCoopers LLP San Jose, California June 24, 1999