Quarterly report pursuant to Section 13 or 15(d)

Semiconductor and MEMS Capital Equipment related Asset Sales (Details)

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Semiconductor and MEMS Capital Equipment related Asset Sales (Details)
 3 Months Ended
Jun. 30, 2012
USD ($)
Jun. 30, 2011
USD ($)
May 07, 2012
EUR (€)
Mar. 31, 2012
USD ($)
Jun. 30, 2012
SPP Process Technology Systems Limited [Member]
USD ($)
Mar. 31, 2012
SPP Process Technology Systems Limited [Member]
USD ($)
SPTS Transaction [Abstract]            
Sale consideration $ 2,100,000          
Sale consideration by transferring liabilities 500,000          
Sale consideration received in cash 1,600,000          
Assets of Discontinued Operations:            
Accounts and other receivables, net of allowances for sales returns and doubtful accounts of $0 at June 30, 2012 and March 31, 2012, respectively 0     410,000    
Prepaid expenses and other current assets 11,000     418,000 11,000 8,000
Total assets of discontinued operations 11,000     418,000    
Liabilities of Discontinued Operations:            
Accrued expenses and other current liabilities 206,000     246,000    
Total liabilities of discontinued operations 206,000     246,000    
Allowance for sales returns and doubtful accounts 0     0    
Disposal group including discontinued operation VAT refund     312,000      
Loss from finalization of sale of DRIE assets   89,000        
Operating expense for discontinued operations $ 1 $ 2