Quarterly report pursuant to Section 13 or 15(d)

Semiconductor and MEMS Capital Equipment related Asset Sales (Details)

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Semiconductor and MEMS Capital Equipment related Asset Sales (Details)
 3 Months Ended 9 Months Ended
Dec. 31, 2011
USD ($)
Dec. 31, 2012
USD ($)
Dec. 31, 2011
USD ($)
May 07, 2012
EUR (€)
Mar. 31, 2012
USD ($)
SPTS Transaction [Abstract]          
Sale consideration   $ 2,100,000      
Sale consideration by transferring liabilities   500,000,000      
Sale consideration received in cash   1,600,000      
Assets of Discontinued Operations [Abstract]          
Accounts and other receivables, net of allowances for sales returns and doubtful accounts of $0 at December 31, 2012 and March 31, 2012, respectively   0     410,000
Prepaid expenses and other current assets   11,000     8,000
Total assets of discontinued operations   11,000     418,000 [1]
Liabilities of Discontinued Operations [Abstract]          
Accrued expenses and other current liabilities   16,000     246,000
Total liabilities of discontinued operations   16,000     246,000
Allowance for sales returns and doubtful accounts   0     0
Disposal group including discontinued operation VAT refund       312,000  
Deferred revenue 130,000   130,000    
Loss from finalization of sale of DRIE assets 89,000 54,000      
Installment payments received related to sale of legacy assets 440,000        
Foreign currency transaction 64,000        
Loss from finalization of sale of NLD patents     3,550,000    
Net Book Value 0   0    
Cost recognized in discontinued operations     813,000    
Commission expense     $ 767,000    
Number of patents   35 35    
[1] Derived from the Company's audited consolidated financial statements.