EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

We hereby consent to the incorporation by reference in the Registration
Statements on Form S-8 (No. 333-462 and 333-12473) of Tegal Corporation of our
report dated April 24, 1998 appearing on page 40 of Tegal Corporation's Annual
Report on Form 10-K. We also consent to the incorporation by reference of our
report on the Financial Statement Schedule, which appears on page S-2 of this
Annual Report on Form 10K.

                                       /s/ Price Waterhouse LLP

San Jose, California
May 18, 1998