EXHIBIT
32.1
CERTIFICATION
PURSUANT TO
SECTION
906 OF THE SARBANES-OXLEY ACT OF 2002
(18
U.S.C. SECTION 1350)
In connection with the amended Annual
Report of Tegal Corporation, a Delaware corporation (the “Company”), on Form
10-K for the year ending March 31, 2010 as filed with the Securities and
Exchange Commission (the “Report”), I, Thomas R. Mika, President and Chief
Executive Officer of the Company, certify, pursuant to §Sec. 906 of the
Sarbanes-Oxley Act of 2002 (18 U.S.C. §Sec. 1350), that to my
knowledge:
(1) The
Report fully complies with the requirements of section 13(a) or 15(d) of the
Securities Exchange Act of 1934, as amended; and
(2) The
information contained in the Report fairly presents, in all material respects,
the financial condition and result of operations of the Company.
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/s/ Thomas R.
Mika
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Chief
Executive Officer and President
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June
11, 2010
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CERTIFICATION
PURSUANT TO
SECTION
906 OF THE SARBANES-OXLEY ACT OF 2002
(18
U.S.C. SECTION 1350)
In connection with the amended Annual
Report of Tegal Corporation, a Delaware corporation (the “Company”), on Form
10-K for the year ending March 31, 2010 as filed with the Securities and
Exchange Commission (the “Report”), I, Christine Hergenrother, Chief Financial
Officer of the Company, certify, pursuant to §Sec. 906 of the Sarbanes-Oxley Act
of 2002 (18 U.S.C. §Sec. 1350), that to my knowledge:
(1) The
Report fully complies with the requirements of section 13(a) or 15(d) of the
Securities Exchange Act of 1934, as amended; and
(2) The
information contained in the Report fairly presents, in all material respects,
the financial condition and result of operations of the Company.
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/s/ Christine
Hergenrother
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Chief
Financial Officer
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June
11, 2010
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