EXHIBIT
32
CERTIFICATION
PURSUANT TO
SECTION
906 OF THE SARBANES-OXLEY ACT OF 2002
(18
U.S.C. SECTION 1350)
In
connection with the Quarterly Report
of Tegal Corporation, a Delaware corporation (the “Company”), on Form 10-Q for
the quarter ended September 30, 2007 as filed with the Securities and Exchange
Commission (the “Report”), I, Thomas R. Mika, President and Chief Executive
Officer of the Company, certify, pursuant to § 906 of the Sarbanes-Oxley Act of
2002 (18 U.S.C. § 1350), that to my knowledge:
(1)
The
Report fully complies with the requirements of section 13(a) or 15(d) of the
Securities Exchange Act of 1934, as amended; and
(2)
The
information contained in the Report fairly presents, in all material respects,
the financial condition and result of operations of the Company.
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/s/ Thomas
R. Mika
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Chief
Executive Officer and President
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November
14, 2007
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CERTIFICATION
PURSUANT TO
SECTION
906 OF THE SARBANES-OXLEY ACT OF 2002
(18
U.S.C. SECTION 1350)
In
connection with the Quarterly Report of Tegal Corporation, a Delaware
corporation (the “Company”), on Form 10-Q for the quarter ended September 30,
2007 as filed with the Securities and Exchange Commission (the “Report”), I,
Christine Hergenrother, Chief Financial Officer of the Company, certify,
pursuant to § 906 of the Sarbanes-Oxley Act of 2002 (18 U.S.C. § 1350), that to
my knowledge:
(1)
The
Report fully complies with the requirements of section 13(a) or 15(d) of the
Securities Exchange Act of 1934, as amended; and
(2)
The
information contained in the Report fairly presents, in all material respects,
the financial condition and result of operations of the Company.
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Chief
Financial Officer
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November
14, 2007
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