Quarterly report pursuant to Section 13 or 15(d)

Document And Entity Information

v2.3.0.15
Document And Entity Information (USD $)
6 Months Ended
Sep. 30, 2011
Oct. 18, 2011
Mar. 31, 2011
Entity Registrant Name TEGAL CORP /DE/    
Entity Central Index Key 0000931059    
Current Fiscal Year End Date --03-31    
Entity Well-known Seasoned Issuer No    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Filer Category Smaller Reporting Company    
Entity Public Float     $ 5,066,421
Entity Common Stock, Shares Outstanding   1,688,807  
Document Fiscal Year Focus 2011    
Document Fiscal Period Focus Q2    
Document Type 10-Q    
Amendment Flag false    
Document Period End Date Sep. 30, 2011