FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
Clarke Andrew P
   2. Issuer Name and Ticker or Trading Symbol
TEGAL CORP /DE/ [TGAL] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Vice President
(Last)
(First)
(Middle)
C/O 2201 S. MCDOWELL BLVD		 3. Date of Earliest Transaction (Month/Day/Year)
03/25/2005
(Street)

PETALUMA, CA 94954		 4. If Amendment, Date Original Filed(Month/Day/Year)
 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Qualified Stock Options $ 1.32 03/25/2005(1)   A   25,000 (1)   03/25/2005(1) 06/15/2014 Common Stock 25,000 $ 1.32 25,000 D  
Non-Qualified Stock Options $ 1.3 03/25/2005(2)   A   25,000 (2)   03/25/2005(2) 09/28/2014 Common Stock 25,000 $ 1.3 50,000 D  
Non-Qualified Stock Options $ 1.03 03/25/2005(3)   A   25,000 (3)   03/25/2005(3) 03/11/2015 Common Stock 25,000 $ 1.03 75,000 D  
Non-Qualified Stock Options $ 1.03 03/11/2005   A   16,500   03/11/2005(4) 03/11/2015 Common Stock 16,500 $ 1.03 91,500 D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
Clarke Andrew P
C/O 2201 S. MCDOWELL BLVD
PETALUMA, CA 94954		       Vice President  

Signatures

 Christine T. Hergenrother, VP & CFO, by power of atty   03/31/2005
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) On 6/15/04, Mr. Clarke was granted an option to purchase 100,000 shares of common stock. The option vests in increments of 25,000 shares based upon the Company's satisfaction of certain performance criteria. The performance criteria were met resulting in vesting of the option as to the 25,000 shares.
(2) On 9/28/04, Mr. Clarke was granted an option to purchase 100,000 shares of common stock. The option vests in increments of 25,000 shares based upon the Company's satisfaction of certain performance criteria. The performance criteria were met resulting in vesting of the option as to the 25,000 shares.
(3) On 3/2/05, Mr. Clarke was granted an option to purchase 50,000 shares of common stock. The option vests in increments of 25,000 shares based upon the Company's satisfaction of certain performance criteria. The performance criteria were met resulting in vesting of the option as to the 25,000 shares.
(4) 8,250 shares to vest on 3/11/05 and remaining 8,250 shares to vest on 3/11/06

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