Exhibit 23.2

We hereby consent to the incorporation by reference in the Prospectus
constituting part of this Registration Statement on Form S-3 of our report dated
April 24, 1998 appearing on page 38 of Tegal Corporation's Annual Report on
Form 10-K for the year ended March 31, 1998. We also consent to the
incorporation by reference of our report on the Financial Statement Schedule
which appears on page S-2 of such Annual Report on Form 10-K. We also consent to
the reference to us under the heading "Experts" in such Prospectus.


   
/s/ PricewaterhouseCoopers LLP
    

San Jose, California

   
September 23, 1998