Ownership Submission

FORM 3

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940

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3235-0104

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(Print or Type Responses)

1. Name and Address of Reporting Person ^*

MARXE AUSTIN W & GREENHOUSE DAVID M

2. Date of Event Requiring Statement (Month/Day/Year)
09/10/2003

3. Issuer Name and Ticker or Trading Symbol
TEGAL CORP /DE/ [TGAL]

(Last)

(First)

(Middle)

153 E 53RD ST, 55TH FL

4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

_____ Director	__X__ 10% Owner
_____ Officer (give title below)	_____ Other (specify below)

5. If Amendment, Date Original Filed(Month/Day/Year)

(Street)

NEW YORK, NY 10022

6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person

(City)

(State)

(Zip)

Table I - Non-Derivative Securities Beneficially Owned

1.Title of Security (Instr. 4)	2. Amount of Securities Beneficially Owned (Instr. 4)	3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	4. Nature of Indirect Beneficial Ownership (Instr. 5)
Common Stock	800	I	By Limited Partnerships

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.			SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 4)	2. Date Exercisable and Expiration Date (Month/Day/Year)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
1. Title of Derivative Security (Instr. 4)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares	4. Conversion or Exercise Price of Derivative Security		6. Nature of Indirect Beneficial Ownership (Instr. 5)
Convertible Secured Debenture	07/01/2003	06/30/2011	Common Shares	761,971 ⁽¹⁾	$ 0.35	I ⁽¹⁾	By Limited Partnerships ⁽¹⁾
Convertible Secured Debenture	09/10/2003	09/09/2011	Common Stock	6,216,286 ⁽¹⁾	$ 0.35	I ⁽¹⁾	By Limited Partnerships ⁽¹⁾
Warrants	07/01/2003	06/30/2011	Common Stock	185,312 ⁽¹⁾	$ 0.5	I ⁽¹⁾	By Limited Partnerships ⁽¹⁾
Warrants	09/10/2003	09/09/2011	Common Stock	1,243,240 ⁽¹⁾	$ 0.5	I ⁽¹⁾	By Limited Partnerships ⁽¹⁾

Reporting Owners

Reporting Owner Name / Address	Relationships
Reporting Owner Name / Address	Director	10% Owner	Officer	Other
MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK, NY 10022		X

Signatures

Austin W. Marxe		10/09/2003
^**Signature of Reporting Person		Date
David M. Greenhouse		10/09/2003
^**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 5(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Private Equity Fund, LP (PE), Special Situations Technology Fund, L.P. (Tech) and Special Situations Technology II, L.P. (Tech II), respectively. 800 shares of Common Stock, 1,465,350 Bond Cvt for 4,186,714 Common Shares & 857,131 Wts are held by PE, 159,942 Bonds Cvt for 456,977 common shares & 93,515 Wts are held by Tech and 817,098 Bonds Cvt for 2,334,566 Common Shares & 477,906 Wts are held by Tech II. The interest of Marxe and Greenhouse in the above shares owned by PE, Tech, and Tech II is limited to the extent of his pecuniary interest.

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