Delaware
(State
or other jurisdiction
of
incorporation)
|
000-26824
(Commission
File
Number)
|
68-0370244
(I.R.S.
Employer
Identification
No.)
|
Name
|
Title
|
Amount
of Bonus
|
Thomas
Mika
|
President,
Chief Executive Officer
|
$125,000
|
Christine
Hergenrother
|
Vice
President, Chief Financial Officer
|
$75,000
|
Date: September
21, 2010
|
TEGAL
CORPORATION
|
||
By:
|
/s/
Christine
Hergenrother
|
||
Name:
Title:
|
Christine
Hergenrother
Vice
President & Chief Financial
Officer
|