Annual report pursuant to Section 13 and 15(d)

Document and Entity Information

v2.4.0.6
Document and Entity Information (USD $)
12 Months Ended
Mar. 31, 2012
Jun. 15, 2012
Sep. 30, 2011
Document and Entity Information [Abstract]      
Entity Registrant Name TEGAL CORP /DE/    
Entity Central Index Key 0000931059    
Current Fiscal Year End Date --03-31    
Entity Well-known Seasoned Issuer No    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Filer Category Smaller Reporting Company    
Entity Public Float     $ 3,124,293
Entity Common Stock, Shares Outstanding   1,688,807  
Document Fiscal Year Focus 2012    
Document Fiscal Period Focus FY    
Document Type 10-K    
Amendment Flag false    
Document Period End Date Mar. 31, 2012