EXHIBIT 32


                    CERTIFICATION OF CHIEF EXECUTIVE OFFICER

    Pursuant  to  18  U.S.C.  ss.  1350,  as  created  by  Section  906  of  the
Sarbanes-Oxley  Act of 2002, the undersigned  officer of Tegal  Corporation (the
"Company") hereby certifies, to such officer's knowledge, that:

      (i)   the accompanying  Quarterly Report on Form 10-Q/A of the Company for
            the quarterly  period ended December 31, 2003 (the  "Report")  fully
            complies with the requirements of Section 13(a) or Section 15(d), as
            applicable, of the Securities Exchange Act of 1934, as amended; and

      (ii)  the  information  contained in the Report  fairly  presents,  in all
            material respects, the financial condition and results of operations
            of the Company.

Date: June 25, 2004                                    /s/ MICHAEL L. PARODI
                                                       -------------------------
                                                       Michael L. Parodi
                                                       Chief Executive  Officer


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                    CERTIFICATION OF CHIEF FINANCIAL OFFICER

    Pursuant  to  18  U.S.C.  ss.  1350,  as  created  by  Section  906  of  the
Sarbanes-Oxley  Act of 2002, the undersigned  officer of Tegal  Corporation (the
"Company") hereby certifies, to such officer's knowledge, that:

      (i)   the  accompanying  Quarterly  Report on Form 10-Q/A (as restated) of
            the Company for the  quarterly  period ended  December 31, 2003 (the
            "Report")  fully complies with the  requirements of Section 13(a) or
            Section  15(d),  as applicable,  of the  Securities  Exchange Act of
            1934, as amended; and

      (ii)  the  information  contained in the Report  fairly  presents,  in all
            material respects, the financial condition and results of operations
            of the Company.

Dated: June 25, 2004                                    /s/ THOMAS R. MIKA
                                                        ------------------------
                                                        Thomas R. Mika
                                                        Chief Financial Officer



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