| 
               | 
          
| 
               | 
            
               þ 
             | 
            
               QUARTERLY
      REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF
      1934 
             | 
          
| 
               | 
            
               o 
             | 
            
               TRANSITION REPORT PURSUANT TO
      SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF
      1934 
             | 
          
| 
                 Delaware 
               | 
              
                 68-0370244 
               | 
            
| 
                 (State
      or other jurisdiction of 
               | 
              
                 (I.R.S.
      Employer Identification No.) 
               | 
            
| 
                 incorporation
      or organization) 
               | 
              
| 
               Large
      Accelerated Filer ¨ 
             | 
            
               Accelerated
      Filer ¨ 
             | 
          
| 
               Non-Accelerated
      Filer ¨ (Do
      not check if a smaller reporting company) 
             | 
            
               Smaller
      reporting company þ 
             | 
          
| 
               | 
          
| 
                                 Page 
                               | 
                            ||
| 
                                 PART
      I. FINANCIAL INFORMATION 
                               | 
                              ||
| 
                                 Item
      1. 
                               | 
                              
                                 Condensed
      Consolidated Financial Statements (Unaudited) 
                               | 
                              
                                 3
       
                               | 
                            
| 
                                 Condensed
      Consolidated Balance Sheets as of September 30, 2010 and March 31,
      2010 
                               | 
                              
                                 3 
                               | 
                            |
| 
                                 Condensed
      Consolidated Statements of Operations for the three and six months ended
      September 30, 2010 and September 30, 2009 
                               | 
                              
                                 4 
                               | 
                            |
| 
                                 Condensed
      Consolidated Statements of Cash Flows for the six months ended September
      30, 2010 and September 30, 2009 
                               | 
                              
                                 5 
                               | 
                            |
| 
                                 Notes
      to Condensed Consolidated Financial Statements 
                               | 
                              
                                 6 
                               | 
                            |
| 
                                 Item
      2. 
                               | 
                              
                                 Management’s
      Discussion and Analysis of Financial Condition and Results of
      Operations 
                               | 
                              
                                 15 
                               | 
                            
| 
                                 Item
      3. 
                               | 
                              
                                 Quantitative
      and Qualitative Disclosures About Market Risk 
                               | 
                              
                                 24 
                               | 
                            
| 
                                 Item
      4. 
                               | 
                              
                                 Controls
      and Procedures 
                               | 
                              
                                 24 
                               | 
                            
| 
                                 PART
      II. OTHER INFORMATION 
                               | 
                              ||
| 
                                 Item
      1A. 
                               | 
                              
                                 Risk
      Factors 
                               | 
                              
                                 25 
                               | 
                            
| 
                                 Item
      6. 
                               | 
                              
                                 Exhibits 
                               | 
                              
                                 25 
                               | 
                            
| 
                                 Signatures 
                               | 
                              
                                 26 
                               | 
                            |
| 
                   September 30, 
                 | 
                
                   March 31, 
                 | 
                |||||||
| 
                   2010 
                 | 
                
                   2010 
                 | 
                |||||||
| 
                   ASSETS 
                 | 
                ||||||||
| 
                   Current
      assets: 
                 | 
                ||||||||
| 
                   Cash
      and cash equivalents 
                 | 
                $ | 4,373 | $ | 7,298 | ||||
| 
                   Accounts
      receivable, net of allowances for sales returns and doubtful accounts of
      $196 and $324 at September 30, 2010 and March 31, 2010,
      respectively. 
                 | 
                2,829 | 3,116 | ||||||
| 
                   Notes
      receivable 
                 | 
                1,527 | 1,347 | ||||||
| 
                   Inventories,
      net 
                 | 
                1,407 | 1,221 | ||||||
| 
                   Prepaid
      expenses and other current assets 
                 | 
                202 | 1,243 | ||||||
| 
                   Total
      current assets 
                 | 
                10,338 | 14,225 | ||||||
| 
                   Property
      and equipment, net 
                 | 
                241 | 308 | ||||||
| 
                   Intangible
      assets, net 
                 | 
                1,118 | 1,230 | ||||||
| 
                   Other
      assets 
                 | 
                6 | 540 | ||||||
| 
                   Total
      assets 
                 | 
                $ | 11,703 | $ | 16,303 | ||||
| 
                   LIABILITIES
      AND STOCKHOLDERS’ EQUITY 
                 | 
                ||||||||
| 
                   Current
      liabilities: 
                 | 
                ||||||||
| 
                   Accounts
      payable 
                 | 
                $ | 568 | $ | 1,520 | ||||
| 
                   Accrued
      product warranty 
                 | 
                474 | 374 | ||||||
| 
                   Common
      stock warrant liability 
                 | 
                21 | 363 | ||||||
| 
                   Deferred
      revenue 
                 | 
                223 | 242 | ||||||
| 
                   Accrued
      expenses and other current liabilities 
                 | 
                535 | 1,867 | ||||||
| 
                   Total
      current liabilities 
                 | 
                1,821 | 4,366 | ||||||
| 
                   Commitments
      and contingencies (Item 2) 
                 | 
                ||||||||
| 
                   Stockholders’
      equity: 
                 | 
                ||||||||
| 
                   Preferred
      stock; $0.01 par value; 5,000,000 shares authorized; none issued and
      outstanding 
                 | 
                - | - | ||||||
| 
                   Common
      stock; $0.01 par value; 50,000,000 shares authorized; 8,439,095 and
      8,438,115 shares issued and outstanding at September 30, 2010 and March
      31, 2010, respectively. 
                 | 
                84 | 84 | ||||||
| 
                   Additional
      paid-in capital 
                 | 
                128,549 | 128,290 | ||||||
| 
                   Accumulated
      other comprehensive loss 
                 | 
                (129 | ) | (149 | ) | ||||
| 
                   Accumulated
      deficit 
                 | 
                (118,622 | ) | (116,288 | ) | ||||
| 
                   Total
      stockholders’ equity 
                 | 
                9,882 | 11,937 | ||||||
| 
                   Total
      liabilities and stockholders’ equity 
                 | 
                $ | 11,703 | $ | 16,303 | ||||
| 
                   Three Months Ended 
                 | 
                
                   Six Months Ended 
                 | 
                |||||||||||||||
| 
                   September 30, 
                 | 
                
                   September 30, 
                 | 
                |||||||||||||||
| 
                   2010 
                 | 
                
                   2009 
                 | 
                
                   2010 
                 | 
                
                   2009 
                 | 
                |||||||||||||
| 
                   Revenue 
                 | 
                $ | 3,183 | $ | 3,117 | $ | 3,502 | $ | 4,200 | ||||||||
| 
                   Cost
      of revenue 
                 | 
                1,952 | 2,269 | 2,502 | 3,259 | ||||||||||||
| 
                   Gross
      profit 
                 | 
                1,231 | 848 | 1,000 | 941 | ||||||||||||
| 
                   Operating
      expenses: 
                 | 
                ||||||||||||||||
| 
                   Research
      and development expenses 
                 | 
                542 | 1,170 | 1,565 | 2,411 | ||||||||||||
| 
                   Sales
      and marketing expenses 
                 | 
                150 | 670 | 308 | 1,374 | ||||||||||||
| 
                   General
      and administrative expenses 
                 | 
                927 | 810 | 2,077 | 1,973 | ||||||||||||
| 
                   Total
      operating expenses 
                 | 
                1,619 | 2,650 | 3,950 | 5,758 | ||||||||||||
| 
                   Operating
      loss 
                 | 
                (388 | ) | (1,802 | ) | (2,950 | ) | (4,817 | ) | ||||||||
| 
                   Other
      income (expense), net 
                 | 
                527 | 114 | 623 | 471 | ||||||||||||
| 
                   Income
      (loss) before income tax expense (benefit) 
                 | 
                139 | (1,688 | ) | (2,327 | ) | (4,346 | ) | |||||||||
| 
                   Income
      tax expense (benefit) 
                 | 
                5 | 1 | 7 | (50 | ) | |||||||||||
| 
                   Net
      income (loss) 
                 | 
                $ | 134 | $ | (1,689 | ) | $ | (2,334 | ) | $ | (4,296 | ) | |||||
| 
                   Net
      income (loss) per share: 
                 | 
                ||||||||||||||||
| 
                   Basic 
                 | 
                $ | 0.02 | $ | (0.20 | ) | $ | (0.28 | ) | $ | (0.51 | ) | |||||
| 
                   Diluted 
                 | 
                $ | 0.02 | $ | (0.20 | ) | $ | (0.28 | ) | $ | (0.51 | ) | |||||
| 
                   Weighted
      average shares used in per share computation: 
                 | 
                ||||||||||||||||
| 
                   Basic 
                 | 
                8,439 | 8,415 | 8,438 | 8,415 | ||||||||||||
| 
                   Diluted 
                 | 
                8,460 | 8,415 | 8,438 | 8,415 | ||||||||||||
| 
                   Six
      Months Ended 
                 | 
                ||||||||
| 
                   September 30 
                 | 
                ||||||||
| 
                   2010 
                 | 
                
                   2009 
                 | 
                |||||||
| 
                   Cash
      flows from operating activities: 
                 | 
                ||||||||
| 
                   Net
      loss 
                 | 
                $ | (2,334 | ) | $ | (4,296 | ) | ||
| 
                   Adjustments
      to reconcile net loss to net cash used in operating
      activities: 
                 | 
                ||||||||
| 
                   Stock
      compensation expense 
                 | 
                258 | 313 | ||||||
| 
                   Stock
      issued under stock purchase plan 
                 | 
                1 | 4 | ||||||
| 
                   Fair
      value adjustment of common stock warrants 
                 | 
                (341 | ) | (58 | ) | ||||
| 
                   (Recovery)
      provision for doubtful accounts and sales returns
    allowances 
                 | 
                (128 | ) | (47 | ) | ||||
| 
                   Depreciation
      and amortization 
                 | 
                209 | 617 | ||||||
| 
                   Loss
      on disposal of property and equipment 
                 | 
                146 | 61 | ||||||
| 
                   Changes
      in operating assets and liabilities: 
                 | 
                ||||||||
| 
                   Accounts
      receivables and other receivables 
                 | 
                (52 | ) | 491 | |||||
| 
                   Inventories,
      net 
                 | 
                (186 | ) | (214 | ) | ||||
| 
                   Prepaid
      expenses and Other assets 
                 | 
                1,576 | (137 | ) | |||||
| 
                   Accounts
      payable 
                 | 
                (951 | ) | 9 | |||||
| 
                   Accrued
      expenses and other current liabilities 
                 | 
                (1,333 | ) | (121 | ) | ||||
| 
                   Accrued
      product warranty 
                 | 
                100 | (150 | ) | |||||
| 
                   Deferred
      revenue 
                 | 
                (20 | ) | 84 | |||||
| 
                   Net
      cash used in operating activities 
                 | 
                (3,055 | ) | (3,444 | ) | ||||
| 
                   Cash
      flows used in investing activities: 
                 | 
                ||||||||
| 
                   Purchases
      of property and equipment 
                 | 
                (176 | ) | (376 | ) | ||||
| 
                   Net
      cash received on asset disposition 
                 | 
                250 | — | ||||||
| 
                   Net
      cash used in investing activities: 
                 | 
                74 | (376 | ) | |||||
| 
                   Cash
      flows used in financing activities: 
                 | 
                ||||||||
| 
                   Net
      cash used in financing activities 
                 | 
                — | — | ||||||
| 
                   Effect
      of exchange rates on cash and cash equivalents 
                 | 
                56 | (55 | ) | |||||
| 
                   Net
      decrease in cash and cash equivalents 
                 | 
                (2,925 | ) | (3,875 | ) | ||||
| 
                   Cash
      and cash equivalents at beginning of period 
                 | 
                7,298 | 12,491 | ||||||
| 
                   Cash
      and cash equivalents at end of period 
                 | 
                $ | 4,373 | $ | 8,616 | ||||
| 
                   Supplemental
      disclosure of non-cash activities: 
                 | 
                ||||||||
| 
                   Reclassification
      of common stock warrant liability upon adoption of EITF 07-05 (Topic
      815) 
                 | 
                $ | - | $ | 848 | ||||
| 
               1.  
             | 
            
               Basis
      of Presentation: 
             | 
          
| 
                     STOCK OPTIONS: 
                   | 
                  
                     2010 
                   | 
                  
                     2009 
                   | 
                  ||||||
| 
                     Expected
      life (years) 
                   | 
                  6.0 | 6.0 | ||||||
| 
                     Volatility 
                   | 
                  75.1 | % | 80.0 | % | ||||
| 
                     Risk-free
      interest rate 
                   | 
                  1.27 | % | 2.31 | % | ||||
| 
                     Dividend
      yield 
                   | 
                  0 | % | 0 | % | ||||
| 
                         ESPP: 
                       | 
                      
                         2010 
                       | 
                      
                         2009 
                       | 
                      ||||||
| 
                         Expected
      life (years) 
                       | 
                      0.5 | 0.5 | ||||||
| 
                         Volatility 
                       | 
                      86.2 | % | 79.8 | % | ||||
| 
                         Risk-free
      interest rate 
                       | 
                      0.14 | % | 0.14 | % | ||||
| 
                         Dividend
      yield 
                       | 
                      0 | % | 0 | % | ||||
| 
                                              Weighted 
                                           | 
                                          |||||||||||||
| 
                                             Weighted 
                                           | 
                                          
                                             Average 
                                           | 
                                          ||||||||||||
| 
                                             Average 
                                           | 
                                          
                                             Remaining 
                                           | 
                                          
                                             Aggregate 
                                           | 
                                          |||||||||||
| 
                                             Exercise 
                                           | 
                                          
                                             Contractual 
                                           | 
                                          
                                             Intrinsic 
                                           | 
                                          |||||||||||
| 
                                             Shares 
                                           | 
                                          
                                             Price 
                                           | 
                                          
                                             Term (in Years) 
                                           | 
                                          
                                             Value 
                                           | 
                                          ||||||||||
| 
                                             Beginning outstanding 
                                           | 
                                          2,247,519 | $ | 8.83 | ||||||||||
| 
                                             Granted 
                                           | 
                                          |||||||||||||
| 
                                             Price
      = market value 
                                           | 
                                          — | — | |||||||||||
| 
                                             Total 
                                           | 
                                          — | — | |||||||||||
| 
                                             Exercised 
                                           | 
                                          — | 0.00 | |||||||||||
| 
                                             Cancelled 
                                           | 
                                          |||||||||||||
| 
                                             Forfeited 
                                           | 
                                          (5,243 | ) | 3.15 | ||||||||||
| 
                                             Expired 
                                           | 
                                          (1,309,151 | ) | 11.98 | ||||||||||
| 
                                             Total 
                                           | 
                                          (1,314,394 | ) | 11.95 | ||||||||||
| 
                                             Ending
      outstanding 
                                           | 
                                          933,125 | $ | 4.56 | 
                                             5.31 
                                           | 
                                          
                                             $ 
                                           | 
                                          
                                             — 
                                           | 
                                          |||||||
| 
                                             Ending
      vested and expected to vest 
                                           | 
                                          903,531 | $ | 4.63 | 
                                             5.24 
                                           | 
                                          
                                             $ 
                                           | 
                                          
                                             — 
                                           | 
                                          |||||||
| 
                                             Ending
      exercisable 
                                           | 
                                          640,811 | $ | 5.41 | 
                                             4.46 
                                           | 
                                          
                                             $ 
                                           | 
                                          
                                             — 
                                           | 
                                          |||||||
| 
                                 Weighted 
                               | 
                              |||||||||||||||||||||||||
| 
                                 Weighted 
                               | 
                              
                                 Average 
                               | 
                              ||||||||||||||||||||||||
| 
                                 Number 
                               | 
                              
                                 Average 
                               | 
                              
                                 | 
                              
                                 Number 
                               | 
                              
                                 Exercise 
                               | 
                              |||||||||||||||||||||
| 
                                 Outstanding 
                               | 
                              
                                 Remaining 
                               | 
                              
                                 Weighted 
                                 | 
                              
                                 Exercisable 
                               | 
                              
                                 Price 
                               | 
                              |||||||||||||||||||||
| 
                                 | 
                              
                                 As of 
                               | 
                              
                                 Contractual 
                               | 
                              
                                 Average 
                                 | 
                              
                                 As of 
                               | 
                              
                                 As of 
                               | 
                              ||||||||||||||||||||
| 
                                 Range of 
                                 | 
                              
                                 Term 
                               | 
                              
                                 Exercise 
                                 | 
                              
                                 September 30, 
                               | 
                              
                                 September 30, 
                               | 
                              |||||||||||||||||||||
|       
                                 Exercise Prices 
                               | 
                              
                                 2010 
                               | 
                              
                                 (in
      years) 
                               | 
                                    
                                 Price  
                               | 
                              
                                 2010 
                               | 
                              
                                 2010 
                               | 
                              ||||||||||||||||||||
| 
                                 $ 
                               | 
                              
                                 1.20 
                               | 
                              1.25 | 24,997 | 0.38 | 1.22 | 14,581 | 1.22 | ||||||||||||||||||
| 
                                  2.34 
                               | 
                              2.34 | 302,597 | 7.59 | 2.34 | 80,338 | 2.34 | |||||||||||||||||||
| 
                                  3.44 
                               | 
                              3.94 | 42,706 | 5.60 | 3.64 | 34,789 | 3.62 | |||||||||||||||||||
| 
                                  4.20 
                               | 
                              4.20 | 160,954 | 6.43 | 4.20 | 113,486 | 4.20 | |||||||||||||||||||
| 
                                  4.60 
                               | 
                              4.60 | 140,258 | 4.39 | 4.60 | 137,254 | 4.60 | |||||||||||||||||||
| 
                                  4.63 
                               | 
                              5.62 | 33,350 | 6.40 | 4.97 | 33,350 | 4.97 | |||||||||||||||||||
| 
                                  6.00 
                               | 
                              6.00 | 126,241 | 0.94 | 6.00 | 126,241 | 6.00 | |||||||||||||||||||
| 
                                  6.11 
                               | 
                              18.11 | 100,919 | 4.21 | 10.76 | 99,669 | 10.70 | |||||||||||||||||||
| 
                                  30.00 
                               | 
                              34.80 | 873 | 1.25 | 30.29 | 873 | 30.29 | |||||||||||||||||||
| 
                                  37.08 
                               | 
                              37.08 | 230 | 3.18 | 37.08 | 230 | 37.08 | |||||||||||||||||||
| 
                                 $ 
                               | 
                              
                                 1.20 
                               | 
                              $ | 37.08 | 933,125 | 5.31 | $ | 4.56 | 640,811 | $ | 5.41 | |||||||||||||||
| 
                         Weighted 
                       | 
                      ||||||||
| 
                         Avg. 
                       | 
                      ||||||||
| 
                         Number 
                       | 
                      
                         Grant 
                       | 
                      |||||||
| 
                         of 
                       | 
                      
                         Date 
                       | 
                      |||||||
| 
                         Shares 
                       | 
                      
                         Fair Value 
                       | 
                      |||||||
| 
                         Balance,
      June 30, 2010 
                       | 
                      21,619 | $ | 0.78 | |||||
| 
                         Granted 
                       | 
                      - | $ | - | |||||
| 
                         Forfeited 
                       | 
                      (952 | ) | $ | - | ||||
| 
                         Vested 
                       | 
                      (750 | ) | $ | - | ||||
| 
                         Balance,
      September 30, 2010 
                       | 
                      19,917 | $ | 0.49 | |||||
| 
               2.  
             | 
            
               Inventories: 
             | 
          
| 
                               September 30, 
                             | 
                            
                               March 31, 
                             | 
                            |||||||
| 
                               2010 
                             | 
                            
                               2010 
                             | 
                            |||||||
| 
                               Raw
      materials 
                             | 
                            $ | 437 | $ | 386 | ||||
| 
                               Work
      in progress 
                             | 
                            249 | 39 | ||||||
| 
                               Finished
      goods and spares 
                             | 
                            721 | 796 | ||||||
| $ | 1,407 | $ | 1,221 | |||||
| 
               3.  
             | 
            
               Product
      Warranty: 
             | 
          
| 
                           Warranty Activity for the 
                         | 
                        
                           Warranty Activity for the 
                         | 
                        |||||||||||||||
| 
                           Three Months Ended 
                         | 
                        
                           Six Months Ended 
                         | 
                        |||||||||||||||
| 
                           September 30, 
                         | 
                        
                           September 30, 
                         | 
                        |||||||||||||||
| 
                           2010 
                         | 
                        
                           2009 
                         | 
                        
                           2010 
                         | 
                        
                           2009 
                         | 
                        |||||||||||||
| 
                           Balance
      at the beginning of the period 
                         | 
                        $ | 275 | $ | 522 | $ | 374 | $ | 702 | ||||||||
| 
                           Additional
      warranty accruals for 
                         | 
                        305 | 201 | 545 | 242 | ||||||||||||
| 
                           warranties
      issued during the period 
                         | 
                        ||||||||||||||||
| 
                           Warranty
      expense during the period 
                         | 
                        (106 | ) | (279 | ) | (445 | ) | (500 | ) | ||||||||
| 
                           Balance
      at the end of the period 
                         | 
                        $ | 474 | $ | 444 | $ | 474 | $ | 444 | ||||||||
| 
               4.  
             | 
            
               Net
      Income (Loss) Income Per Common Share
(EPS): 
             | 
          
| 
                                 Three
      Months Ended 
                                September
      30, 
                               | 
                              
                                 Six
      Months Ended 
                                September
      30, 
                               | 
                              |||||||||||||||
| 
                                 2010 
                               | 
                              
                                 2009 
                               | 
                              
                                 2010 
                               | 
                              
                                 2009 
                               | 
                              |||||||||||||
| 
                                 Net
      income (loss) applicable to common stockholders 
                               | 
                              $ | 134 | $ | (1,689 | ) | $ | (2,334 | ) | $ | (4,296 | ) | |||||
| 
                                 Basic
      and diluted: 
                               | 
                              ||||||||||||||||
| 
                                 Weighted-average
      common shares outstanding 
                               | 
                              8,439 | 8,415 | 8,438 | 8,415 | ||||||||||||
| 
                                 Plus
      diluted - common stock equivalents 
                               | 
                              21 | — | — | — | ||||||||||||
| 
                                 Weighted-average
      common shares used in diluted net income (loss) per common
      share 
                               | 
                              8,460 | 8,415 | 8,438 | 8,415 | ||||||||||||
| 
                                 Basic
      net income (loss) per common share 
                               | 
                              $ | 0.02 | $ | (0.20 | ) | $ | (0.28 | ) | $ | (0.51 | ) | |||||
| 
                                 Diluted
      net income (loss) per common share 
                               | 
                              $ | 0.02 | $ | (0.20 | ) | $ | (0.28 | ) | $ | (0.51 | ) | |||||
| 
               5.  
             | 
            
               Financial
      Instruments: 
             | 
          
| 
               6.  
             | 
            
               Asset
      Acquisitions and Sales: 
             | 
          
| 
                     Assets
      acquired: 
                   | 
                  ||||
| 
                     Trademarks 
                   | 
                  $ | 428 | ||
| 
                     Patents 
                   | 
                  2,648 | |||
| 
                     Total
      Intangible Assets 
                   | 
                  3,076 | |||
| 
                     Fixed
      Assets 
                   | 
                  24 | |||
| 
                     Inventory 
                   | 
                  1,900 | |||
| 
                     Total
      Tangible Assets 
                   | 
                  1,924 | |||
| 
                     Total
      Acquired Assets 
                   | 
                  $ | 5,000 | ||
| 
               | 
            
               · 
             | 
            
               Cash
      in the amount of $250,000 paid at closing, which occurred on March 19,
      2010; 
             | 
          
| 
               | 
            
               · 
             | 
            
               An
      aggregate of $1,750,000 cash payable to the Company by four installment
      payments of $250,000, $500,000, $500,000 and $500,000 each on July 1,
      2010, October 1, 2010, January 1, 2011 and April 1, 2011, respectively;
      and 
             | 
          
| 
               | 
            
               · 
             | 
            
               A
      contingent payment in cash of up to $1,000,000 payable to the Company by
      April 15, 2011 based on the following percentage of applicable bookings of
      Etch and PVD Products in excess of $6,000,000 received by the Company or
      OEM Group during the period beginning March 19, 2010 through March 31,
      2011: 
             | 
          
| 
               | 
            
               o 
             | 
            
               if applicable bookings are
      greater than or equal to $6,000,000 but less than $8,000,000, the
      contingent payment will be 5% of the applicable bookings in excess of
      $6,000,000; 
             | 
          
| 
               | 
            
               o 
             | 
            
               if
      applicable bookings are greater than or equal to $8,000,000 but less than
      $10,000,000, the contingent payment will be $100,000 plus 10% of the
      applicable bookings in excess of
$8,000,000; 
             | 
          
| 
               | 
            
               o 
             | 
            
               if
      applicable bookings are greater than or equal to $10,000,000 but less than
      $12,000,000, the contingent payment will be $300,000 plus 15% of the
      applicable bookings in excess of $10,000,000;
  and 
             | 
          
| 
               | 
            
               o 
             | 
            
               if applicable bookings are
      greater than or equal to $12,000,000, the contingent payment will be
      $600,000 plus
      20% of the
      applicable bookings in excess of
  $12,000,000. 
             | 
          
| 
               7.  
             | 
            
               Geographical
      Information: 
             | 
          
| 
                     Revenue for the 
                   | 
                  
                     Revenue for the 
                   | 
                  |||||||||||||||
| 
                     Three Months Ended 
                   | 
                  
                     Six Months Ended 
                   | 
                  |||||||||||||||
| 
                     September 30, 
                   | 
                  
                     September 30, 
                   | 
                  |||||||||||||||
| 
                     2010 
                   | 
                  
                     2009 
                   | 
                  
                     2010 
                   | 
                  
                     2009 
                   | 
                  |||||||||||||
| 
                     Sales to customers located in: 
                   | 
                  ||||||||||||||||
| 
                     North
      America 
                   | 
                  $ | 120 | $ | 2,512 | $ | 389 | $ | 3,152 | ||||||||
| 
                     Asia 
                   | 
                  4 | 193 | 4 | 395 | ||||||||||||
| 
                     Germany 
                   | 
                  1 | 58 | 11 | 87 | ||||||||||||
| 
                     France 
                   | 
                  829 | 121 | 829 | 181 | ||||||||||||
| 
                     Europe,
      excluding Germany and France 
                   | 
                  2,229 | 233 | 2,269 | 385 | ||||||||||||
| 
                     Total
      sales 
                   | 
                  $ | 3,183 | $ | 3,117 | $ | 3,502 | $ | 4,200 | ||||||||
| 
                         September 30, 
                       | 
                      ||||||||
| 
                         Long-Lived assets at period-end: 
                       | 
                      
                         2010 
                       | 
                      
                         2009 
                       | 
                      ||||||
| 
                         United
      States 
                       | 
                      $ | 130 | $ | 879 | ||||
| 
                         Europe 
                       | 
                      111 | 297 | ||||||
| 
                         Total
      long-lived assets 
                       | 
                      $ | 241 | $ | 1,176 | ||||
| 
               8.  
             | 
            
               Recent
      Accounting Pronouncements: 
             | 
          
| 
                   Three Months Ended 
                 | 
                
                   Six Months Ended 
                 | 
                |||||||||||||||
| 
                   September 30, 
                 | 
                
                   September 30, 
                 | 
                |||||||||||||||
| 
                   2010 
                 | 
                
                   2009 
                 | 
                
                   2010 
                 | 
                
                   2009 
                 | 
                |||||||||||||
| 
                   Revenue 
                 | 
                100.0 | % | 100.0 | % | 100.0 | % | 100.0 | % | ||||||||
| 
                   Cost
      of revenue 
                 | 
                61.3 | % | 72.8 | % | 71.4 | % | 77.6 | % | ||||||||
| 
                   Gross
      profit 
                 | 
                38.7 | % | 27.2 | % | 28.6 | % | 22.4 | % | ||||||||
| 
                   Operating
      expenses: 
                 | 
                ||||||||||||||||
| 
                   Research
      and development 
                 | 
                17.0 | % | 37.5 | % | 44.7 | % | 57.4 | % | ||||||||
| 
                   Sales
      and marketing 
                 | 
                4.7 | % | 21.5 | % | 8.8 | % | 32.7 | % | ||||||||
| 
                   General
      and administrative 
                 | 
                29.1 | % | 26.0 | % | 59.3 | % | 47.0 | % | ||||||||
| 
                   Total
      operating expenses 
                 | 
                50.8 | % | 85.0 | % | 112.8 | % | 137.1 | % | ||||||||
| 
                   Operating
      loss 
                 | 
                (12.1 | )% | (57.8 | )% | (84.2 | )% | (114.7 | )% | ||||||||
| 
                   Other
      income (expense), net 
                 | 
                16.6 | % | 3.7 | % | 17.8 | % | 11.2 | % | ||||||||
| 
                   Income
      (loss) before income tax expense (benefit) 
                 | 
                4.5 | % | (54.1 | )% | (66.4 | )% | (103.5 | )% | ||||||||
| 
                   Income
      tax expense (benefit) 
                 | 
                0.2 | % | — | % | 0.2 | % | (1.2 | )% | ||||||||
| 
                   Net
      income (loss) 
                 | 
                4.3 | % | (54.1 | )% | (66.6 | )% | (102.3 | )% | ||||||||
| 
                   Three Months Ended 
                 | 
                
                   Six Months Ended 
                 | 
                |||||||||||||||
| 
                   September 30, 
                 | 
                
                   September 30, 
                 | 
                |||||||||||||||
| 
                   2010 
                 | 
                
                   2009 
                 | 
                
                   2010 
                 | 
                
                   2009 
                 | 
                |||||||||||||
| 
                   Revenue 
                 | 
                $ | 3,183 | $ | 3,117 | $ | 3,502 | $ | 4,200 | ||||||||
| 
                   Cost
      of revenue 
                 | 
                1,952 | 2,269 | 2,502 | 3,259 | ||||||||||||
| 
                   Gross
      profit 
                 | 
                1,231 | 848 | 1,000 | 941 | ||||||||||||
| 
                   Operating
      expenses: 
                 | 
                ||||||||||||||||
| 
                   Research
      and development expenses 
                 | 
                542 | 1,170 | 1,565 | 2,411 | ||||||||||||
| 
                   Sales
      and marketing expenses 
                 | 
                150 | 670 | 308 | 1,374 | ||||||||||||
| 
                   General
      and administrative expenses 
                 | 
                927 | 810 | 2,077 | 1,973 | ||||||||||||
| 
                   Total
      operating expenses 
                 | 
                1,619 | 2,650 | 3,950 | 5,758 | ||||||||||||
| 
                   Operating
      loss 
                 | 
                (388 | ) | (1,802 | ) | (2,950 | ) | (4,817 | ) | ||||||||
| 
                   Other
      income (expense), net 
                 | 
                527 | 114 | 623 | 471 | ||||||||||||
| 
                   Income
      (loss) before income tax expense (benefit) 
                 | 
                139 | (1,688 | ) | (2,327 | ) | (4,346 | ) | |||||||||
| 
                   Income
      tax expense (benefit) 
                 | 
                5 | 1 | 7 | (50 | ) | |||||||||||
| 
                   Net
      income (loss) 
                 | 
                $ | 134 | $ | (1,689 | ) | $ | (2,334 | ) | $ | (4,296 | ) | |||||
| 
                   Net
      income (loss) per share: 
                 | 
                ||||||||||||||||
| 
                   Basic 
                 | 
                $ | 0.02 | $ | (0.20 | ) | $ | (0.28 | ) | $ | (0.51 | ) | |||||
| 
                   Diluted 
                 | 
                $ | 0.02 | $ | (0.20 | ) | $ | (0.28 | ) | $ | (0.51 | ) | |||||
| 
                   Weighted
      average shares used in per share computation: 
                 | 
                ||||||||||||||||
| 
                   Basic 
                 | 
                8,439 | 8,415 | 8,438 | 8,415 | ||||||||||||
| 
                   Diluted 
                 | 
                8,460 | 8,415 | 8,438 | 8,415 | ||||||||||||
| 
                     Contractual obligations: 
                   | 
                  
                     Less than 
                   | 
                  
                     After 
                   | 
                  ||||||||||||||||||
| 
                     Total 
                   | 
                  
                     1 Year 
                   | 
                  
                     1-3 Years 
                   | 
                  
                     3-5 Years 
                   | 
                  
                     5 Years 
                   | 
                  ||||||||||||||||
| 
                     Non-cancelable
      operating lease obligations 
                   | 
                  $ | 212 | $ | 107 | $ | 105 | $ | - | $ | - | ||||||||||
| 
                       Exhibit 
                      Number 
                     | 
                    
                       Description 
                     | 
                  |
| 
                       31.1 
                     | 
                    
                       Certifications
      of the Chief Executive Officer pursuant to Section 302 of the
      Sarbanes-Oxley Act of 2002. 
                     | 
                  |
| 
                       31.2 
                     | 
                    
                       Certifications
      of the Chief Financial Officer pursuant to Section 302 of the
      Sarbanes-Oxley Act of 2002. 
                     | 
                  |
| 
                       32 
                     | 
                    
                       | 
                    
                       Certifications
      of the Chief Executive Officer and Chief Financial Officer pursuant to
      Section 906 of the Sarbanes-Oxley Act of
2002. 
                     | 
                  
| 
               TEGAL
      CORPORATION 
              (Registrant) 
             | 
          |
| 
               /s/ CHRISTINE T.
    HERGENROTHER 
             | 
          |
| 
               Christine
      T. Hergenrother 
             | 
          |
| 
               Chief
      Financial Officer 
             |