Quarterly report pursuant to Section 13 or 15(d)

Document And Entity Information

 v2.3.0.11
Document And Entity Information (USD $)
3 Months Ended
Jun. 30, 2010
Aug. 05, 2011
Sep. 30, 2010
Entity Registrant Name TEGAL CORP /DE/    
Entity Central Index Key 0000931059    
Current Fiscal Year End Date --03-31    
Entity Well-known Seasoned Issuer No    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Filer Category Smaller Reporting Company    
Entity Public Float     $ 3,445,964
Entity Common Stock, Shares Outstanding   1,688,807  
Document Fiscal Year Focus 2011    
Document Fiscal Period Focus Q1    
Document Type 10-Q    
Amendment Flag false    
Document Period End Date Jun. 30, 2011