FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  BONANZA CAPITAL LTD
 2. Date of Event Requiring Statement (Month/Day/Year)
09/15/2005		 3. Issuer Name and Ticker or Trading Symbol
TEGAL CORP /DE/ [TGAL]
(Last)
(First)
(Middle)
300 CRESCENT COURT, SUITE 1740		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director __X__ 10% Owner
_____ Officer (give title below) _____ Other (specify below)
5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

DALLAS, TX 75201		 6. Individual or Joint/Group Filing(Check Applicable Line)
___ Form filed by One Reporting Person
_X_ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Shares 6,153,846
I
Footnote (1)

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Warrants 07/11/2005 07/11/2010 Common Stock 560,000 $ 1 I Footnote (1)
Warrants 09/15/2005 09/15/2010 Common Stock 2,516,923 $ 1 I Footnote (1)

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
BONANZA CAPITAL LTD
300 CRESCENT COURT
SUITE 1740
DALLAS, TX 75201		     X    
BONANZA MASTER FUND LTD
C/O J.D. CLARK & CO.
ONE PRAESIDEO PLACE, 1590 W. PARK CIRCLE
OGDEN, UT 84404		     X    

Signatures

Bonanza Capital, Ltd.(+) By: /s/ Bernay Box 09/26/2005
**Signature of Reporting Person Date
Bonanza Master Fund, Ltd.(+) By: /s/ Bernay Box 09/26/2005
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) The securities reported herein are held in the account of Bonanza Master Fund, Ltd. (the "Master Fund"), a private investment fund. Bonanza Capital, Ltd. may be deemed to be a beneficial owner of such securities by virtue of its role as the investment manager of the Master Fund.
 
Remarks:
(+) Each of Bonanza Capital, Ltd. and Bonanza Master Fund, Ltd. (each, a "Reporting Person" and together, the "Reporting
Persons"), disclaims beneficial ownership of the reported securities except to the extent of its pecuniary interest therein.
The Reporting Persons affirmatively disclaim being a "group" for purposes of Section 16 of the Securities Exchange Act of
1934, as amended.

Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, See Instruction 6 for procedure.

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