Quarterly report pursuant to Section 13 or 15(d)

Document And Entity Information

Document And Entity Information (USD $)
9 Months Ended
Dec. 31, 2011
Feb. 02, 2012
Mar. 31, 2011
Entity Registrant Name TEGAL CORP /DE/    
Entity Central Index Key 0000931059    
Current Fiscal Year End Date --03-31    
Entity Well-known Seasoned Issuer No    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Filer Category Smaller Reporting Company    
Entity Public Float     $ 5,066,421
Entity Common Stock, Shares Outstanding   1,688,807  
Document Fiscal Year Focus 2011    
Document Fiscal Period Focus Q3    
Document Type 10-Q    
Amendment Flag false    
Document Period End Date Dec. 31, 2011