Annual report pursuant to Section 13 and 15(d)

Promissory Notes Payable- Current Amounts Due (Details)

v3.2.0.727
Promissory Notes Payable- Current Amounts Due (Details) - USD ($)
$ in Thousands
Jul. 12, 2012
Mar. 31, 2015
Debt Instrument [Line Items]    
Promissory notes assumed as part of the purchase price $ 500  
Tegal Corporation [Member] | Promissory Notes [Member]    
Debt Instrument [Line Items]    
Promissory notes assumed as part of the purchase price $ 500  
Tegal Corporation [Member] | Promissory Notes [Member] | Subsequent Event [Member]    
Debt Instrument [Line Items]    
First installment, principal amount   $ (167)
Second installment, principal amount   (167)
Third installment, principal amount   (166)
Unpaid accrued interest   $ (41)