Promissory Notes Payable- Current Amounts Due (Details) - USD ($) $ in Thousands |
Jul. 12, 2012 |
Mar. 31, 2015 |
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Debt Instrument [Line Items] | ||
Promissory notes assumed as part of the purchase price | $ 500 | |
Tegal Corporation [Member] | Promissory Notes [Member] | ||
Debt Instrument [Line Items] | ||
Promissory notes assumed as part of the purchase price | $ 500 | |
Tegal Corporation [Member] | Promissory Notes [Member] | Subsequent Event [Member] | ||
Debt Instrument [Line Items] | ||
First installment, principal amount | $ (167) | |
Second installment, principal amount | (167) | |
Third installment, principal amount | (166) | |
Unpaid accrued interest | $ (41) |
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- Definition Amount of liabilities incurred by the acquirer as part of consideration transferred in a business combination. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available.
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- Definition Carrying value as of the balance sheet date of [accrued] interest payable on all forms of debt, including trade payables, that has been incurred and is unpaid. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Reference 1: http://www.xbrl.org/2003/role/presentationRef
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- Definition Amount of long-term debt payable, sinking fund requirements, and other securities issued that are redeemable by holder at fixed or determinable prices and dates maturing in the next rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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- Definition Amount of long-term debt payable, sinking fund requirements, and other securities issued that are redeemable by holder at fixed or determinable prices and dates maturing in the third rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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- Definition Amount of long-term debt payable, sinking fund requirements, and other securities issued that are redeemable by holder at fixed or determinable prices and dates maturing in the second rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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