Quarterly report pursuant to Section 13 or 15(d)

Semiconductor and MEMS Capital Equipment related Asset Sales (Details)

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Semiconductor and MEMS Capital Equipment related Asset Sales (Details)
 3 Months Ended 6 Months Ended
Sep. 30, 2012
USD ($)
Sep. 30, 2011
USD ($)
Sep. 30, 2012
USD ($)
Sep. 30, 2011
USD ($)
May 07, 2012
EUR (€)
Mar. 31, 2012
USD ($)
SPTS Transaction [Abstract]            
Sale consideration $ 2,100,000   $ 2,100,000      
Sale consideration by transferring liabilities 500,000   500,000      
Sale consideration received in cash 1,600,000   1,600,000      
Assets of Discontinued Operations:            
Accounts and other receivables, net of allowances for sales returns and doubtful accounts of $0 at Sept. 30, 2012 and March 31, 2012, respectively 0   0     410,000
Prepaid expenses and other current assets 11,000   11,000     8,000
Total assets of discontinued operations 11,000   11,000     418,000
Liabilities of Discontinued Operations:            
Accrued expenses and other current liabilities 155,000   155,000     246,000
Total liabilities of discontinued operations 155,000   155,000     246,000
Allowance for sales returns and doubtful accounts 0   0     0
Disposal group including discontinued operation VAT refund         312,000  
Deferred revenue   130,000   130,000    
Loss from finalization of sale of DRIE assets       89,000    
Installment payments received related to sale of legacy assets       300,000    
Foreign currency transaction       29,000    
Loss from discontinued operations $ 3,000 $ (241,000) $ 4,000 $ (239,000)