Quarterly report pursuant to Section 13 or 15(d)

Document and Entity Information

v2.4.0.6
Document and Entity Information
3 Months Ended
Jun. 30, 2012
Aug. 07, 2012
Document and Entity Information [Abstract]    
Entity Registrant Name TEGAL CORP /DE/  
Entity Central Index Key 0000931059  
Current Fiscal Year End Date --03-31  
Entity Well-known Seasoned Issuer No  
Entity Voluntary Filers No  
Entity Current Reporting Status Yes  
Entity Filer Category Smaller Reporting Company  
Entity Common Stock, Shares Outstanding   1,688,807
Document Fiscal Year Focus 2013  
Document Fiscal Period Focus Q1  
Document Type 10-Q  
Amendment Flag false  
Document Period End Date Jun. 30, 2012